Large dry pumps for harsh process

Based on the field proven technology developed over the last 15 years in the semiconductor industry, Alcatel has developed a new high capacity dry pump series able to answer the needs of harsh Solar process applications, such as PECVD SiN, or semiconductor processes such as TiN, ALD,...
This range is composed of 2 versions: AD63KH and AD73KH, the choice depends on flows and volumes to be pumped.

Key features
• High pumping speed (up to 4,950 m3/h)
• High Volume/High Flow version (up to 75 slm H2 continuous, up to 10 m3)
• Low CoO
o Reduced power consumption
o Low cooling water requirements
o Modular concept for flexibility

Benefits
• The AD3KH range uses the well proven multistage roots technology, one of the lowest energy consumption technologies on the market
• NF3 compatible (with special shaft and cast iron materials)
• Highest protection against powder and highly corrosive gases
• Compatible with field monitoring networks
• Wheel mounted frame for easy maintenance

Applications:
• Photovoltaic cell processing (ARC, PECVD)
• Semiconductor Processes (ALD, TiN...)
• NF3 cleans compatible