Comunicati stampa

The iPUP : A universal roughing pump from AMAT and Alcatel

Article from Kevin Hill - AMAT, published in Wafers News - August 2001 The transition from 200mm to 300mm wafers has generally meant that roughing pumps (typically located outside the cleanroom away from the process tool itself - will have to get larger to accommodate the increase in process chamber size. However, the iPUP (integrated point-of-use pump), co-designed by Applied Materials (AMAT) and Alcatel and introduced at Semicon West, seemingly turns long-standing assumptions about roughing pumps on their ear. "Alcatel was the first of our suppliers to be ready," stated Kevin Hill, senior product marketing manager with AMAT's vacuum system products customer productivity support group. "Because AMAT has something like 160 to 200 different process applications, the company needs flexibility in pump solutions. We found that different suppliers are able to develop alternate versions that have features better suited for some processes versus others. Our three partners in this joint development have unique approaches to achieve the required specifications and should be ready with their versions later this year." The specifications for the iPUP detail dimensions of 600 x 280 x 300mm, when installed under the fab floor, the pump has what AMAT calls a zero footprint installation. The company claims that power requirements for the Alcatel-made pump are reduced by half when compared to traditional-size roughing pumps. Furthermore, although the version introduced by AMAT at Semicon West was an on-board (the processing tool) model, AMAT plans on introducing local pumps later. Alcatel was showing portable, wheeled, standalone pumps at Semicon West. "Generally, 20% of all power consumed by a fab is tied directly or indirectly to pumps," explained Hill. "The iPUP can cut power requirements in half, saving a typical fab 10% of its total power load. The performance of an iPUP integrated with the processing tool is roughly double that of a 250 m<+>3<+>/hr remote pump with blower," commented Hill. He added, "The iPUP is on wheels and has an integrated handle. It's also cleanroom compatible so when maintenance has to be done, the technician can just wheel it around as necessary without having to go outside the cleanroom." Spares and inventory management were also considerations since, according to Hill, the iPUP can be used with almost any process application on competitors' tools - 300mm or otherwise - provided the performance specifications are comparable.-D.V.