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The Alcatel dry pums range : the ADP/ADS Series Two

Alcatel improves its field proven multi-stage Roots technology for dry pumps with its "Series Two" range. This full range is composed of only 3 multiprocess pumps compatible with high operating temperatures and one high capacity load-lock pump ranging from 112 to 1150 m3/h. Customer benefits include among others : enhanced performance, lower Cost Of Ownership, smaller footprint and volume, easier back-up management and greater process adaptation with precise temperature control system for higher reliability. New features include improved monitoring with hand-held remote control, nitrogen mass flow sensor, stand-by purge function, power failure protection, full Semi S2-93 compliance. The Alcatel Series Two dry pumps provide the ultimate solution for all processes ranging from load locks to etch and CVD.