Molecular decontamination and protection for carriers and substrates
Adixen Pod Regenerator (APR)
An ultimate solution against Airborne Molecular Contamination (AMC).
Adixen POD Regenerator (APR) for <130 nm nodes decontaminates wafers and their carrier providing molecular decontamination and active protection in one go.
Benefits
- Stops crystal growth / Corrosion
- Relax queue time rules and simplifies storage management.
- Eliminates AMC such as HF, HCl, VOC in carrier environment and on the substrate.
- Removes Air & Halogen & organic compounds
- Protects carrier and substrate within from contaminated environments for days.
- Suppresses fab cross contamination risks
- Low CoO.
Assurance to the yield improvement.
For more information, please contact Roland BERNARD: roland.bernard@adixen.fr
Adixen POD Regenerator (APR) for <130 nm nodes decontaminates wafers and their carrier providing molecular decontamination and active protection in one go.
Benefits
- Stops crystal growth / Corrosion
- Relax queue time rules and simplifies storage management.
- Eliminates AMC such as HF, HCl, VOC in carrier environment and on the substrate.
- Removes Air & Halogen & organic compounds
- Protects carrier and substrate within from contaminated environments for days.
- Suppresses fab cross contamination risks
- Low CoO.
Assurance to the yield improvement.
For more information, please contact Roland BERNARD: roland.bernard@adixen.fr
